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Micro and Smart Systems Technology and Modeling
Chapter 1 Introduction 1
Chapter 2 Micro Sensors, Actuators, Systems, and
Smart Materials: An Overview 17
Chapter 3 Micromachining Technologies 55
Chapter 4 Mechanics of Slender Solids in
Microsystems 111
Chapter 5 The Finite Element Method 177
Chapter 6 Modeling of Coupled Electromechanical
Systems 245
Chapter 7 Electronics Circuits and Control for
Micro and Smart Systems 313
Chapter 8 Integration of Micro & Smart Systems 363
Chapter 9 Scaling Effects in Microsystems 409
Chapter 10 Simulation of Microsystems Using FEA
Software 429
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