1 Desperation 2 Help from an Unlikely Source 3 Rearranging the Mental Furniture 4 Setup and Pushback 5 Friday Night Fights 6 Weeding the Garden 7 Creating the Vision 8 Monday, Monday. Can't Trust That Day 9 The Shortest Weekend Ever 10 Monday, Monday, Redux 11 Where's the Value? 12 On the Road Again 13 You Can Take It to the Bank 14 It was the Best of Times, It was the Wor…
Chapter 1 Introduction 1 Chapter 2 Crystal Growth 17 Chapter 3 Silicon Oxidation 41 Chapter 4 Photolithography 60 Chapter 5 Etching 85 Chapter 6 Diffusion 105 Chapter 7 Ion Implantation 124 Chapter 8 Film Deposition 144 Chapter 9 Process Integration 182 Chapter 10 IC Manufacturing 226 Chapter 11 Future Trends and Challenges 259 This concise introducti…