Chapter 1 Introduction 1 Chapter 2 Micro Sensors, Actuators, Systems, and Smart Materials: An Overview 17 Chapter 3 Micromachining Technologies 55 Chapter 4 Mechanics of Slender Solids in Microsystems 111 Chapter 5 The Finite Element Method 177 Chapter 6 Modeling of Coupled Electromechanical Systems 245 Chapter 7 Electronics Circuiā¦